Activities / ASML Case
Sadly the case has been moved, as the lecturer of ASML has gotten ill. We will update you about the new date of this event!
Here they will present a case to us, the NSA-members, where we can see if we're good enough to work at ASML
Programme:
13.30 uur Preparation case
14.00 uur Intro + explanation case
14.30 uur Start case
16.30 uur Present results + solution ASML
17.00 uur Pizza/drinks
Info about the case:
"Manufacturing 3D NAND requires very high aspect ratio etching and, as a result, needs a hard-mask to allow for this.
These hard-masks provide an added challenge for wafer alignment in x-y position due to the fact that they are opaque.
The wafer alignment in ASML’s machines is currently done optically to nm accuracy. The challenge is; how do we align the wafer to the required nm accuracy through an opaque layer?"