Activities / ASML Case

On Thursday, the 3th of October, ASML will come all the way from Veldhoven to our own Science Park right here in Amsterdam! Here they will present a case to us, the NSA-members, where we can see if we're good enough to work at ASML

Programme:
13.30 uur Preparation case
14.00 uur Intro + explanation case
14.30 uur Start case
16.30 uur Present results + solution ASML
17.00 uur Pizza/drinks

Info about the case:

Wafer alignment  through Opaque layers

Manufacturing 3D NAND requires very high aspect ratio etching and, as a result, needs a hard-mask to allow for this. These hard-masks provide an added challenge for wafer alignment in x-y position due to the fact that they are opaque. The wafer alignment in ASML’s machines is currently done optically to nm accuracy. The challenge is; how do we align the wafer to the required nm accuracy through an opaque layer?